EC EN 550
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(EC En-Me En) Microelectromechanical Systems (MEMS).
Electrical and Computer Engineering
Ira A. Fulton College of Engineering
Course Description
Design, fabrication, and applications of MEMS. Mechanical properties governing their design and reliability and the processing technologies used to fabricate them.
When Taught
Winter Odd Years
Min
3
Fixed/Max
3
Fixed
3
Fixed
0
Other Prerequisites
EC En 450 or Me En 372 or equivalent
