EC EN 550

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(EC En-Me En) Microelectromechanical Systems (MEMS).

Electrical and Computer Engineering Ira A. Fulton College of Engineering

Course Description

Design, fabrication, and applications of MEMS. Mechanical properties governing their design and reliability and the processing technologies used to fabricate them.

When Taught

Winter Odd Years

Min

3

Fixed

3

Fixed

3

Fixed

0

Other Prerequisites

EC En 450 or Me En 372 or equivalent