ME EN 550

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(Me En-EC En) Microelectromechanical Systems (MEMS).

Mechanical Engineering Ira A. Fulton College of Engineering

Course Description

Design, fabrication, and applications of MEMS. Mechanical properties governing their design and reliability and the processing technologies used to fabricate them.

When Taught

Winter Odd Years

Min

3

Fixed

3

Fixed

3

Fixed

0

Other Prerequisites

or equivalent.

Title

Tools and Processes

Learning Outcome

2. Be familiar with the tools and processes used in micromaching of microelectromechanical systems (MEMS).

Title

Analyze and Design

Learning Outcome

3. Use principles of physics to analyze and design MEMS, including sensors and actuators.

Title

Mechanical Performance

Learning Outcome

1. Use mechanics principles to analyze the mechanical performance of microsystems.