ME EN 550
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(Me En-EC En) Microelectromechanical Systems (MEMS).
Mechanical Engineering
Ira A. Fulton College of Engineering
Course Description
Design, fabrication, and applications of MEMS. Mechanical properties governing their design and reliability and the processing technologies used to fabricate them.
When Taught
Winter Odd Years
Min
3
Fixed
3
Fixed
3
Fixed
0
Other Prerequisites
or equivalent.
Title
Tools and Processes
Learning Outcome
2. Be familiar with the tools and processes used in micromaching of microelectromechanical systems (MEMS).
Title
Analyze and Design
Learning Outcome
3. Use principles of physics to analyze and design MEMS, including sensors and actuators.
Title
Mechanical Performance
Learning Outcome
1. Use mechanics principles to analyze the mechanical performance of microsystems.
