CH EN 481
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Introduction to Semiconductor Processing
Chemical Engineering
Ira A. Fulton College of Engineering
Course Description
Introduction to unit operations related to silicon-based semiconductor processing. Topics include substrate preparation, photolithography, doping, etching, deposition, CMP, interconnects, and device basics.
When Taught
Fall
Min
2
Fixed/Max
2
Fixed
2
Fixed
0
Other Prerequisites
Or equivalents. Junior standing in chemical engineering; EC En 452 must be taken concurrently.
