(EC En-Me En) Microelectromechanical Systems (MEMS)
|Hours||3.0 Credit, 3.0 Lecture, 0.0 Lab|
|Prerequisites||EC En 450 or Me En 372 or equivalent.|
|Taught||Winter odd years|
1. Use mechanics principles to analyze the mechanical performance of microsystems.
Tools and Processes
2. Be familiar with the tools and processes used in micromaching of microelectromechanical systems (MEMS).
Analyze and Design
3. Use principles of physics to analyze and design MEMS, including sensors and actuators.